利用酸式蝕刻氧化鋅奈米線製備氧化鋅奈米管

Abstract

本論文探討利用簡易的酸式蝕刻來製備較不易成長的氧化鋅奈米管，已被廣泛研究的低溫製程氧化鋅奈米管的成長方式，多是使用一個步驟長時間的水熱法製程，對於其半徑較不易控制，使其大小和高寬比皆不盡理想，藉由分離成長及蝕刻兩個製程，改善原先奈米結構尺寸較大的問題。 在本論文中，利用調整蝕刻的時間，了解蝕刻時的反應情形，並改變濃度以得到氧化鋅奈米管的形成和濃度的關係，使用不同直徑的奈米線來進行同樣的製程，進而得到較細的氧化鋅奈米結構，討論蝕刻機制。利用高溫加熱製程和光學性質來驗證其機制，了解機制後再藉此建構出所得到的氧化鋅奈米結構的蝕刻模型。

ZnO nanotubes were prepared by a simple etching process. The fabrication of ZnO nanotubes was harder than it of nanowires. The general process of ZnO nanotubes is a step hydrothermal method by aging and widely researched because of low reaction temperature. However, it is hard to control the diameter and length of ZnO nanotubes due to the growth process still continue when nanotube structure is form so that the size is larger and the aspect ratio is low. Dividing growth and etching process to improve the issues. In this thesis, the etching reaction is clearly observed by modifing the etching time, and change of acidic concentration for getting the relation with the formation of ZnO nanotubes. The nanowires with different diameters are used to get thinner nanotubes. At last, the mechanics of etching process is discussed and proved them by annealing experiments and optical properties. According to the mechanics, etching model of ZnO nanotubes by etching its nanowires was established.