The ellipsometric measurements of a curved surface

doi:10.1143/JJAP.44.L1015

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Lee, KY	en_US
dc.contributor.author	Chao, YF	en_US
dc.date.accessioned	2014-12-08T15:37:07Z	-
dc.date.available	2014-12-08T15:37:07Z	-
dc.date.issued	2005	en_US
dc.identifier.issn	0021-4922	en_US
dc.identifier.uri	http://hdl.handle.net/11536/25488	-
dc.identifier.uri	http://dx.doi.org/10.1143/JJAP.44.L1015	en_US
dc.description.abstract	A three-intensity imaging ellipsometric technique is proposed to investigate the surface topography as well as the refractive index profile (RIP) of a lens. The azimuth deviation of polarizer caused by the tilting of a SiO2 thin film on Si substrate was investigated after a careful calibration on the azimuth position of polarizer of the water-surface. The azimuth deviation of polarizer is proved to be the local surface normal; thus we can determine not only the radius of curvature of a Plano-Convex lens from the measurement, but also its incident-angle-corrected RIP.	en_US
dc.language.iso	en_US	en_US
dc.subject	topography	en_US
dc.subject	imaging ellipsometry	en_US
dc.subject	refractive index profile	en_US
dc.title	The ellipsometric measurements of a curved surface	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1143/JJAP.44.L1015	en_US
dc.identifier.journal	JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS	en_US
dc.citation.volume	44	en_US
dc.citation.issue	28-32	en_US
dc.citation.spage	L1015	en_US
dc.citation.epage	L1018	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000231426100041	-
dc.citation.woscount	5	-
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