標題: | ELLIPSOMETRY MEASUREMENTS ON REFRACTIVE-INDEX PROFILES OF THIN-FILMS |
作者: | HO, JH LEE, CL LEI, TF 交大名義發表 電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering |
公開日期: | 1-八月-1990 |
URI: | http://dx.doi.org/10.1109/19.57248 http://hdl.handle.net/11536/4056 |
ISSN: | 0018-9456 |
DOI: | 10.1109/19.57248 |
期刊: | IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT |
Volume: | 39 |
Issue: | 4 |
起始頁: | 642 |
結束頁: | 648 |
顯示於類別: | 期刊論文 |