標題: | Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition |
作者: | Do, Hien Yen, Tzu-Chun Tian, Chih-Sheng Wu, Yue-Han Chang, Li 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | Titanium oxycarbide;Epitaxial growth;Pulsed laser deposition |
公開日期: | 15-一月-2011 |
摘要: | Epitaxial TiC(x)O(y) thin films were grown on MgO (0 0 1) substrates by using pulsed laser deposition method. High-resolution X-ray diffraction and transmission electron microscopy were used to examine crystallinity and microstructure of epitaxial TiC(x)O(y) film on MgO. The chemical composition of the film is determined to be x similar to 0.47 and y similar to 0.69 by X-ray photoelectron spectroscopy. Atomic force microscopy revealed that the surface of TiC(x)O(y) film is very smooth with roughness of 0.18 nm. The resistivity of the TiC(x)O(y) film measured by four-point-probe method was about 137 mu Omega cm. (C) 2010 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.apsusc.2010.10.105 http://hdl.handle.net/11536/25883 |
ISSN: | 0169-4332 |
DOI: | 10.1016/j.apsusc.2010.10.105 |
期刊: | APPLIED SURFACE SCIENCE |
Volume: | 257 |
Issue: | 7 |
起始頁: | 2990 |
結束頁: | 2994 |
顯示於類別: | 期刊論文 |