標題: | Growth and characterization of tungsten carbide nanowires by thermal annealing of sputter-deposited WCx films |
作者: | Wang, SJ Chen, CH Chang, SC Uang, KM Juan, CP Cheng, HC 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 20-九月-2004 |
摘要: | In this letter, the growth of dense W2C nanowires by a simple thermal annealing of sputter-deposited WCx films in nitrogen ambient is reported. Straight nanowires with a density of 250-260 mum(-2) and length/diameter in the range of 0.2-0.3 mum/13-15 nm were obtained from the 700degreesC-annealed samples, which exhibit good electron field emission characteristics with a typical turn-on field of about 1.7 V/mum. The self-catalytic growth of W2C nanowires is attributed to the formation of alpha-W2C phase caused by carbon depletion in the WCx films during thermal annealing. (C) 2004 American Institute of Physics. |
URI: | http://dx.doi.org/10.1063/1.1791322 http://hdl.handle.net/11536/26371 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.1791322 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 85 |
Issue: | 12 |
起始頁: | 2358 |
結束頁: | 2360 |
顯示於類別: | 期刊論文 |