完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Tsai, TK | en_US |
dc.contributor.author | Chao, CG | en_US |
dc.date.accessioned | 2014-12-08T15:38:56Z | - |
dc.date.available | 2014-12-08T15:38:56Z | - |
dc.date.issued | 2004-06-30 | en_US |
dc.identifier.issn | 0169-4332 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1016/j.apsusc.2004.03.014 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/26657 | - |
dc.description.abstract | The growth morphology and crystallinity of the electroless NiP deposited on Si substrate pretreated by SnCl(2)/HCl and PdCl(2)/ HCl solutions is studied using transmission electron microscope (TEM), field emission scanning electron microscope (FESEM), and energy dispersive X-ray spectrum (EDS). Combining cross-sectional and surface observations show that the reaction mechanism of electroless NiP on Si is an electrochemical mechanism and the deposits are composed of a columnar structure grown along the vertical direction of the substrate surface. The phosphorus content does not have influence on the growth morphology but affects the crystallinity of the deposits. The crystallinity of the deposits is directly observed by the lattice image using high-resolution transmission electron microscope (HRTEM). The as-deposited NiP with 10.7 at.% P possesses good crystallinity and consists of Ni nanocrystal about 4-8 nm distributed randomly in the deposits. The size of nanocrystal in the deposits with 15.2 at.% P is about 2-5 nm. The deposits with 20.3 at.% P have a smaller order range and the size of nanocrystal is under 1.5 nm. The grain size decreases as the phosphorus content increases. (C) 2004 Elsevier B.V. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | electroless NiP | en_US |
dc.subject | growth morphology | en_US |
dc.subject | crystallinity | en_US |
dc.subject | Si | en_US |
dc.title | The growth morphology and crystallinity of electroless NiP deposition on silicon | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/j.apsusc.2004.03.014 | en_US |
dc.identifier.journal | APPLIED SURFACE SCIENCE | en_US |
dc.citation.volume | 233 | en_US |
dc.citation.issue | 1-4 | en_US |
dc.citation.spage | 180 | en_US |
dc.citation.epage | 190 | en_US |
dc.contributor.department | 材料科學與工程學系 | zh_TW |
dc.contributor.department | Department of Materials Science and Engineering | en_US |
dc.identifier.wosnumber | WOS:000222497700024 | - |
dc.citation.woscount | 28 | - |
顯示於類別: | 期刊論文 |