Self-Matched ESD Cell in CMOS Technology for 60-GHz Broadband RF Applications

Abstract

A self-matched ESD cell library has been implemented in a commercial sub-100nm CMOS process for 60-GHz broadband RF applications. This ESD cell library has reached the 50-Omega input/output matching to reduce the design complexity for RF circuit designer and to provide suitable electrostatic discharge (ESD) protection. Experimental results of this ESD cell library have successfully verified the ESD robustness and the RF characteristics in the 60-GHz frequency band. This self-matched ESD cell library is easily to be used for ESD protection design in the 60-GHz broadband RF applications.