Effects of thermal stabilities for the ultra thin chromium layers applied on (Ba,Sr)TiO3 thin films

Abstract

This work reports the temperature-electric properties for the (Ba,Sr)TiO3(BST) thin film capacitor using the multi-film structure of BST/ultra-thin-chromium(Cr) layer/BST. The BST(200 nm)/Cr(1-3 nm)/BST(200 nm) multi-films reveal excellent properties in the thermal stabilities of dielectric property, low leakage current and less power dissipation.