標題: Effects of thermal stabilities for the ultra thin chromium layers applied on (Ba,Sr)TiO3 thin films
作者: Kuo, MW
Shye, DC
Chiou, BS
Chen, JS
Cheng, HC
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: BST (77.84.-s);thermal stability (68.60.Dv);dielectric property (77.55.+f)
公開日期: 2004
摘要: This work reports the temperature-electric properties for the (Ba,Sr)TiO3(BST) thin film capacitor using the multi-film structure of BST/ultra-thin-chromium(Cr) layer/BST. The BST(200 nm)/Cr(1-3 nm)/BST(200 nm) multi-films reveal excellent properties in the thermal stabilities of dielectric property, low leakage current and less power dissipation.
URI: http://hdl.handle.net/11536/27161
http://dx.doi.org/10.1080/10584580490459224
ISSN: 1058-4587
DOI: 10.1080/10584580490459224
期刊: INTEGRATED FERROELECTRICS
Volume: 61
起始頁: 183
結束頁: 187
Appears in Collections:Conferences Paper


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