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dc.contributor.authorChen, HCen_US
dc.contributor.authorLee, CECen_US
dc.date.accessioned2014-12-08T15:40:03Z-
dc.date.available2014-12-08T15:40:03Z-
dc.date.issued2003-12-01en_US
dc.identifier.issn0268-3768en_US
dc.identifier.urihttp://dx.doi.org/10.1007/s00170-002-1531-8en_US
dc.identifier.urihttp://hdl.handle.net/11536/27360-
dc.description.abstractVarious CD wafers (Control and Dummy wafers) are used in wafer fabrication to enhance product quality and process stability. Most wafer fabs downgrade used CD wafers into other functional ones and then recycle them to reduce costs. Wafer costs increase with wafer diameter, and thus the downgrading mechanisms and inventory control of CD wafers have become increasingly important to fab performance. Wafer fabs now are willing to seriously consider CD wafer management but CD wafer management remains neglected in the literature. This study presents a novel pull system focusing on inventory and downgrading management of CD wafers. The proposed system in this study intends to reduce the WIP level of CD wafers, increase recycled usages (number of times CD-wafer lots are recycled) before scraping, and reduce machine delay ratio without lowering the product wafer throughput rate.en_US
dc.language.isoen_USen_US
dc.subjectcontrol wafersen_US
dc.subjectdummy wafersen_US
dc.subjectpull systemen_US
dc.subjectinventory controlen_US
dc.subjectdowngrading pathen_US
dc.subjectrecycled usagesen_US
dc.titlePull system for control and dummy wafersen_US
dc.typeArticleen_US
dc.identifier.doi10.1007/s00170-002-1531-8en_US
dc.identifier.journalINTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGYen_US
dc.citation.volume22en_US
dc.citation.issue11-12en_US
dc.citation.spage805en_US
dc.citation.epage818en_US
dc.contributor.department工業工程與管理學系zh_TW
dc.contributor.departmentDepartment of Industrial Engineering and Managementen_US
dc.identifier.wosnumberWOS:000187129000006-
dc.citation.woscount3-
Appears in Collections:Articles


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