标题: Pull system for control and dummy wafers
作者: Chen, HC
Lee, CEC
工业工程与管理学系
Department of Industrial Engineering and Management
关键字: control wafers;dummy wafers;pull system;inventory control;downgrading path;recycled usages
公开日期: 1-十二月-2003
摘要: Various CD wafers (Control and Dummy wafers) are used in wafer fabrication to enhance product quality and process stability. Most wafer fabs downgrade used CD wafers into other functional ones and then recycle them to reduce costs. Wafer costs increase with wafer diameter, and thus the downgrading mechanisms and inventory control of CD wafers have become increasingly important to fab performance. Wafer fabs now are willing to seriously consider CD wafer management but CD wafer management remains neglected in the literature. This study presents a novel pull system focusing on inventory and downgrading management of CD wafers. The proposed system in this study intends to reduce the WIP level of CD wafers, increase recycled usages (number of times CD-wafer lots are recycled) before scraping, and reduce machine delay ratio without lowering the product wafer throughput rate.
URI: http://dx.doi.org/10.1007/s00170-002-1531-8
http://hdl.handle.net/11536/27360
ISSN: 0268-3768
DOI: 10.1007/s00170-002-1531-8
期刊: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume: 22
Issue: 11-12
起始页: 805
结束页: 818
显示于类别:Articles


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