Mechanism and modeling of ring pattern formation for electron beam exposure on Zwitterresist

Abstract

The novel sensitivity curve was determined for the zwitterresist. The irradiation dose in the center could create a ring pattern due to simultaneous exhibition of the positive tone and negative tone of zwitterresist. The natural logarithm dependence of ring width and electron beam dose was linear in two ranges, irrespective of the dot design radius. The heating effect was identified from 600 muC/cm(2), while it could be neglected at less than 600 muC/cm(2). Mathematical modeling for the prediction of ring width for zwitterresist, was achieved by considering the electron scattering and heating effects. The results of experimental measurement and modeling on ring width showed a very good correlation.