40-GHz coplanar waveguide bandpass filters on silicon substrate

標題:	40-GHz coplanar waveguide bandpass filters on silicon substrate
作者:	Chan, KT Chen, CY Chin, A Hsieh, JC Liu, J Duh, TS Lin, WJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1-十一月-2002
摘要:	We report a very simple process to fabricate high performance filter on Si at 40 GHz; using proton implantation. The filter has only -3.4-dB loss at peak transmission of 40 GHz; with a broad 9-GHz bandwidth. In sharp contrast, the filter on 1.5-mum SiO2 isolated Si has much worse transmission and reflection loss. This is the first demonstration of high performance filter at millimeter-wave regime on Si with process compatible to current VLSI technology.
URI:	http://dx.doi.org/10.1109/LMWC.2002.805535 http://hdl.handle.net/11536/28422
ISSN:	1531-1309
DOI:	10.1109/LMWC.2002.805535
期刊:	IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS
Volume:	12
Issue:	11
起始頁:	429
結束頁:	431
顯示於類別：	期刊論文

文件中的檔案：

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。