INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR

標題:	INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR
作者:	YEH, CF KAO, HW CHANG, BS CHANG, KL 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	1-十月-1993
URI:	http://hdl.handle.net/11536/2846
ISSN:	0261-8028
期刊:	JOURNAL OF MATERIALS SCIENCE LETTERS
Volume:	12
Issue:	19
起始頁:	1506
結束頁:	1507
顯示於類別：	期刊論文