标题: | Characterization of porous silicate for ultra-low k dielectric application |
作者: | Liu, PT Chang, TC Hsu, KC Tseng, TY Chen, LM Wang, CJ Sze, SM 电子工程学系及电子研究所 Department of Electronics Engineering and Institute of Electronics |
关键字: | dielectric constant;porous silicate films;thermal stability |
公开日期: | 1-七月-2002 |
摘要: | Thermal stability of a porous low-k film is a critical issue for application consideration in the back-end-of-line. In this study, thermal stability of the porous silicate has been investigated by changing the thermal processing temperatures. Experimental results have shown that the dielectric constant of the porous silicate still remains below 2.0 after thermal processing at 500 degreesC for I h. A series of material analysis techniques and electrical characteristics have been used to verify the physical and chemical characteristics of the porous silicate film. (C) 2002 Elsevier Science B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/S0040-6090(02)00423-6 http://hdl.handle.net/11536/28675 |
ISSN: | 0040-6090 |
DOI: | 10.1016/S0040-6090(02)00423-6 |
期刊: | THIN SOLID FILMS |
Volume: | 414 |
Issue: | 1 |
起始页: | 1 |
结束页: | 6 |
显示于类别: | Articles |
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