Determination of ultrathin oxide thickness by subthreshold swing

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DC Field	Value	Language
dc.contributor.author	Cha, TS	en_US
dc.date.accessioned	2014-12-08T15:42:27Z	-
dc.date.available	2014-12-08T15:42:27Z	-
dc.date.issued	2002-05-01	en_US
dc.identifier.issn	0021-4922	en_US
dc.identifier.uri	http://dx.doi.org/10.1143/JJAP.41.2904	en_US
dc.identifier.uri	http://hdl.handle.net/11536/28834	-
dc.description.abstract	Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2.	en_US
dc.language.iso	en_US	en_US
dc.subject	oxide	en_US
dc.subject	subthreshold swing	en_US
dc.subject	N2O	en_US
dc.subject	thickness	en_US
dc.title	Determination of ultrathin oxide thickness by subthreshold swing	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1143/JJAP.41.2904	en_US
dc.identifier.journal	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS	en_US
dc.citation.volume	41	en_US
dc.citation.issue	5A	en_US
dc.citation.spage	2904	en_US
dc.citation.epage	2905	en_US
dc.contributor.department	電子物理學系	zh_TW
dc.contributor.department	Department of Electrophysics	en_US
dc.identifier.wosnumber	WOS:000176515700022	-
dc.citation.woscount	0	-
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