標題: Analytic approximations ford multiserver batch-service work-stations with multiple process recipes in semiconductor wafer fabrication
作者: Huang, MG
Chang, PL
Chou, YC
經營管理研究所
Institute of Business and Management
公開日期: 1-Nov-2001
摘要: This study extends previous results for batch-service workstations to batch-service/batch-lot workstations with multiple process recipes, e.g., diffusion operations in semiconductor manufacturing. The model considered herein explicitly considers the existence of a manufacturing operation associated with multiple process recipes in the semiconductor factory. Consequently, the revised balance equations are submitted and an improved approximation is presented for this case. Based on a comparison with simulation results, this new approximation is shown to be superior to the previously developed analytical approaches. This new approximation is especially strong in cases where the number of process recipes grows, system traffic intensity is moderate, and arrival rate of each recipe is nearly the same.
URI: http://dx.doi.org/10.1109/66.964327
http://hdl.handle.net/11536/29311
ISSN: 0894-6507
DOI: 10.1109/66.964327
期刊: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 14
Issue: 4
起始頁: 395
結束頁: 405
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