标题: | Fabrication of optical gratings by shrinkage of a rubber material |
作者: | Shih, Teng-Kai Ho, Jeng-Rong Liao, Hung-Yu Chen, Chia-Fu Liu, Chueh-Yang 材料科学与工程学系 Department of Materials Science and Engineering |
关键字: | PDMS;metal films;wavy structures;gratings |
公开日期: | 30-六月-2008 |
摘要: | Ordered wavy surface structures generated by deposition of a metal thin film on a pre-stretched PDMS plate were fabricated and its potential application for optical gratings was proposed. The orientation of the generated structures was always perpendicular to the pre-stretched direction and the pitch of the structure could be adjusted ranging from 4.5 mu m to 6.8 mu m by controlling the strength of the pre-stretched strain and the thickness of the surface metal film. Based on these periodic structures, various optical gratings were demonstrated. With a slight modification of the fabrication scheme, gratings with different orientations can be fabricated on both sides of the PDMS plate, the double-sided gratings, could be fabricated. It is believed the current method has the potential for the fabrication of a large-scale diffractive grating at lower costs. (C) 2007 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.tsf.2007.07.092 http://hdl.handle.net/11536/29386 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2007.07.092 |
期刊: | THIN SOLID FILMS |
Volume: | 516 |
Issue: | 16 |
起始页: | 5339 |
结束页: | 5343 |
显示于类别: | Conferences Paper |
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