標題: Influence of ligand groups in Ti precursors on phase transformation and microstructural evolution of TiO2 thin films prepared by the wet chemical process
作者: Ting, CC
Chen, SY
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 1-六月-2001
摘要: TiO2 thin films prepared by metalorganic decomposition (MOD-TIO,) and sol-gel processes (SG-TiO2) were investigated in terms of the anatase-to-rutile phase transformation and microstructural evolution. It was found that the chemical reactivity of the ligand groups initially coordinated on the titanium precursor plays a decisive role in the structure development of as-deposited SG- and MOD-TiO2 films. MOD-TiO2 films consist of small aggregated particles and therefore, tend to coalesce together to form an inhomogeneous microstructure during the anatase-to-rutile phase transformation. On the other hand, SG-TiO2 films consist of uniform large particles that tend to grow homogeneously. MOD-TiO2 films showed a higher crystallization temperature than the SG-TiO2 films but the temperature of the anatase-to-rutile phase transformation is much lower in MOD- (approximately 775 degreesC) as compared to SG-TIO, films (approximately 930 degreesC). The activation energy (Q) was estimated as 524 and 882 kJ/mol for the MOD- and SG-TIO, films, respectively, The lower transformation temperature and activation energy in MOD-TiO2 films were due to smaller grain size and more potential nucleation sites existing in the un-transformed MOD-TiO2 film structure, which can accelerate the rate of anatase-to-rutile transformation.
URI: http://hdl.handle.net/11536/29614
ISSN: 0884-2914
期刊: JOURNAL OF MATERIALS RESEARCH
Volume: 16
Issue: 6
起始頁: 1712
結束頁: 1719
顯示於類別:期刊論文


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