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dc.contributor.authorChen, SHen_US
dc.contributor.authorLin, HNen_US
dc.contributor.authorYang, CRen_US
dc.date.accessioned2014-12-08T15:44:45Z-
dc.date.available2014-12-08T15:44:45Z-
dc.date.issued2000-10-01en_US
dc.identifier.issn0034-6748en_US
dc.identifier.urihttp://hdl.handle.net/11536/30211-
dc.description.abstractWe demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 mu m and a height of 31.9 mu m were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm. (C) 2000 American Institute of Physics. [S0034-6748(00)00210-0].en_US
dc.language.isoen_USen_US
dc.titleSurface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probeen_US
dc.typeArticleen_US
dc.identifier.journalREVIEW OF SCIENTIFIC INSTRUMENTSen_US
dc.citation.volume71en_US
dc.citation.issue10en_US
dc.citation.spage3953en_US
dc.citation.epage3954en_US
dc.contributor.department電子物理學系zh_TW
dc.contributor.departmentDepartment of Electrophysicsen_US
dc.identifier.wosnumberWOS:000089554500058-
dc.citation.woscount4-
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