CMOS compatible thermoelectric infrared sensors

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DC Field	Value	Language
dc.contributor.author	Shown, CS	en_US
dc.contributor.author	Chi, S	en_US
dc.date.accessioned	2014-12-08T15:45:11Z	-
dc.date.available	2014-12-08T15:45:11Z	-
dc.date.issued	2000-06-22	en_US
dc.identifier.issn	0013-5194	en_US
dc.identifier.uri	http://dx.doi.org/10.1049/el:20000823	en_US
dc.identifier.uri	http://hdl.handle.net/11536/30455	-
dc.description.abstract	A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices.	en_US
dc.language.iso	en_US	en_US
dc.title	CMOS compatible thermoelectric infrared sensors	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1049/el:20000823	en_US
dc.identifier.journal	ELECTRONICS LETTERS	en_US
dc.citation.volume	36	en_US
dc.citation.issue	13	en_US
dc.citation.spage	1117	en_US
dc.citation.epage	1118	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000087981100016	-
dc.citation.woscount	0	-
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