Full metadata record
DC FieldValueLanguage
dc.contributor.authorChen, CCen_US
dc.contributor.authorLin, HCen_US
dc.contributor.authorChang, CYen_US
dc.contributor.authorLiang, MSen_US
dc.contributor.authorChien, CHen_US
dc.contributor.authorHsien, SKen_US
dc.contributor.authorHuang, TYen_US
dc.date.accessioned2014-12-08T15:45:52Z-
dc.date.available2014-12-08T15:45:52Z-
dc.date.issued2000-01-01en_US
dc.identifier.issn0741-3106en_US
dc.identifier.urihttp://dx.doi.org/10.1109/55.817438en_US
dc.identifier.urihttp://hdl.handle.net/11536/30836-
dc.description.abstractPlasma-induced damage in various 3-nm thick gate oxides (i.e., pure O-2 and N2O-nitrided oxides) was investigated by subjecting both nMOS and pMOS antenna devices to a photoresist ashing step after metal pad definition, Gate leakage current measurements indicated that large leakage current occurs at the wafer center as well as at the wafer edge for pMOS devices, while it occurs only at the wafer center for nMOS devices, These interesting observations could be explained by the polarity dependence of ultrathin oxides in charge-to-breakdown measurements. Additionally, ultrathin N2O-nitrided oxides show superior immunity to charging damage, especially for pMOS devices.en_US
dc.language.isoen_USen_US
dc.subjectboronen_US
dc.subjectdielectric breakdownen_US
dc.subjectleakage currenten_US
dc.subjectplasma applicationsen_US
dc.subjectsemiconductor device reliabilityen_US
dc.titleImproved immunity to plasma damage in ultrathin nitrided oxidesen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/55.817438en_US
dc.identifier.journalIEEE ELECTRON DEVICE LETTERSen_US
dc.citation.volume21en_US
dc.citation.issue1en_US
dc.citation.spage15en_US
dc.citation.epage17en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000084697000005-
dc.citation.woscount11-
Appears in Collections:Articles


Files in This Item:

  1. 000084697000005.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.