Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chiu, MH | en_US |
dc.contributor.author | Lee, JY | en_US |
dc.contributor.author | Su, DC | en_US |
dc.contributor.author | Lee, KH | en_US |
dc.date.accessioned | 2014-12-08T15:46:11Z | - |
dc.date.available | 2014-12-08T15:46:11Z | - |
dc.date.issued | 1999-10-01 | en_US |
dc.identifier.issn | 0141-6359 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1016/S0141-6359(99)00019-7 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/31057 | - |
dc.description.abstract | Based on the effect that the phase difference between s- and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula, the mensurable range of this new optical method is 760 to 0.1 torr. (C) 1999 Elsevier Science Inc. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | vacuum measurement | en_US |
dc.subject | total-internal-reflection | en_US |
dc.subject | heterodyne interferometry | en_US |
dc.title | Vacuum measurement using total-internal-reflection heterodyne interferometry | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/S0141-6359(99)00019-7 | en_US |
dc.identifier.journal | PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | en_US |
dc.citation.volume | 23 | en_US |
dc.citation.issue | 4 | en_US |
dc.citation.spage | 260 | en_US |
dc.citation.epage | 263 | en_US |
dc.contributor.department | 光電工程學系 | zh_TW |
dc.contributor.department | Department of Photonics | en_US |
dc.identifier.wosnumber | WOS:000082758500006 | - |
dc.citation.woscount | 6 | - |
Appears in Collections: | Articles |
Files in This Item:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.