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dc.contributor.authorChiu, MHen_US
dc.contributor.authorLee, JYen_US
dc.contributor.authorSu, DCen_US
dc.contributor.authorLee, KHen_US
dc.date.accessioned2014-12-08T15:46:11Z-
dc.date.available2014-12-08T15:46:11Z-
dc.date.issued1999-10-01en_US
dc.identifier.issn0141-6359en_US
dc.identifier.urihttp://dx.doi.org/10.1016/S0141-6359(99)00019-7en_US
dc.identifier.urihttp://hdl.handle.net/11536/31057-
dc.description.abstractBased on the effect that the phase difference between s- and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula, the mensurable range of this new optical method is 760 to 0.1 torr. (C) 1999 Elsevier Science Inc. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectvacuum measurementen_US
dc.subjecttotal-internal-reflectionen_US
dc.subjectheterodyne interferometryen_US
dc.titleVacuum measurement using total-internal-reflection heterodyne interferometryen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/S0141-6359(99)00019-7en_US
dc.identifier.journalPRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERINGen_US
dc.citation.volume23en_US
dc.citation.issue4en_US
dc.citation.spage260en_US
dc.citation.epage263en_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000082758500006-
dc.citation.woscount6-
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