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dc.contributor.authorChao, YFen_US
dc.contributor.authorWang, MWen_US
dc.contributor.authorKo, ZCen_US
dc.date.accessioned2014-12-08T15:46:13Z-
dc.date.available2014-12-08T15:46:13Z-
dc.date.issued1999-09-07en_US
dc.identifier.issn0022-3727en_US
dc.identifier.urihttp://dx.doi.org/10.1088/0022-3727/32/17/315en_US
dc.identifier.urihttp://hdl.handle.net/11536/31091-
dc.description.abstractThe error in the angle of incidence for a rotating element ellipsometer is evaluated using a uniaxial quartz crystal. At a fixed angle of incidence with respect to the surface of reflection, the ratio of reflectance in the parallel to that in the perpendicular electromagnetic field is measured by rotating the quartz crystal through a full cycle. We determine the deviation in the angle of incidence by comparing: the experimentally measured reflectance ratio to its calculated value.en_US
dc.language.isoen_USen_US
dc.titleAn error evaluation technique for the angle of incidence in a rotating element ellipsometer using a quartz crystalen_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0022-3727/32/17/315en_US
dc.identifier.journalJOURNAL OF PHYSICS D-APPLIED PHYSICSen_US
dc.citation.volume32en_US
dc.citation.issue17en_US
dc.citation.spage2246en_US
dc.citation.epage2249en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.identifier.wosnumberWOS:000082506300018-
dc.citation.woscount9-
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