標題: | An intelligent supervisory system for ion implantation in IC fabrication processes |
作者: | Shen, LC Hsu, PL 電控工程研究所 Institute of Electrical and Control Engineering |
關鍵字: | ion implantation;beam maps;supervision;feature extraction;symptom analysis;fuzzy expert systems |
公開日期: | 1-二月-1999 |
摘要: | This pager presents a real-time intelligent supervision system for IC ion implantation processes. A hardware interface is developed, to extract the features directly from the 2-D analog image signals of a beam map. A qualitative model for the beam scanning is then obtained, and the symptoms of abnormal operations can be analyzed to achieve on-line diagnosis. Furthermore, a fuzzy expert system is developed to advise operators on making appropriate adjustments for the beam scanning. This supervisory system has been implemented on Eaten NV-6200 A/AV ion implanters at the Taiwan Semiconductor Manufacturing Company. (C) 1999 Elsevier Science Ltd. All rights reserved. |
URI: | http://hdl.handle.net/11536/31525 |
ISSN: | 0967-0661 |
期刊: | CONTROL ENGINEERING PRACTICE |
Volume: | 7 |
Issue: | 2 |
起始頁: | 241 |
結束頁: | 247 |
顯示於類別: | 期刊論文 |