標題: A CVD epitaxial deposition in a vertical barrel reactor: Process modeling using cluster-based fuzzy logic models
作者: Chiou, JC
Yang, JY
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: chemical vapor deposition (CVD) modeling;clustering estimation method;fuzzy logic
公開日期: 1-Nov-1998
摘要: A chemical vapor deposition (CVD) epitaxial deposition process modeling using fuzzy logic models (FLM's) has been proposed. The process modeling algorithm consists of a cluster estimation method and backpropagation algorithm to construct a number of modeling structures from the training data. A decision rule based on the multiple correlation factor is used to obtain the optimum structure of fuzzy model using the testing data. Upon the optimum structure has been reached, the gradient-descent method is used to refer the parameters of the final fuzzy model using both training and testing data. The algorithm has been applied to a nonlinear function and a vertical chemical vapor deposition process, The results demonstrate the efficiency and effectiveness of the proposed fuzzy logic model in comparison with existing fuzzy logic models and artificial neural network models.
URI: http://dx.doi.org/10.1109/66.728562
http://hdl.handle.net/11536/31792
ISSN: 0894-6507
DOI: 10.1109/66.728562
期刊: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 11
Issue: 4
起始頁: 645
結束頁: 653
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