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dc.contributor.authorShieh, Li-Jungen_US
dc.contributor.authorChiou, Jin-Chernen_US
dc.date.accessioned2014-12-08T15:47:56Z-
dc.date.available2014-12-08T15:47:56Z-
dc.date.issued2010-11-01en_US
dc.identifier.issn0021-4922en_US
dc.identifier.urihttp://dx.doi.org/10.1143/JJAP.49.116501en_US
dc.identifier.urihttp://hdl.handle.net/11536/32007-
dc.description.abstractIn this paper we present a prestress vertical comb drive resonator with a frequency tuning capability The resonator consists of three sets of comb fingers which act-as driving electrodes The comb fingers are fabricated along with a composite beam One end of the composite beam is clamped to the anchor whereas the other end is elevated vertically by the residual stress A clamped force which is formed by a DC voltage is utilized to restrain the vibration of the composite beam By applying a DC clamped voltage and a driving voltage in different electrodes the resonator exhibits different frequency responses The device is fabricated through a 0 35 mu m complementary metal-oxide-semiconductor (CMOS) process with a post CMOS micromachining process Experimental results indicate that the initial resonant frequency of The device is 18 6 kHz and the maximum frequency tuning range up to 28 5% is obtained The resonator device can recover its original frequency without causing any structural damage (C) 2010 The Japan Society of Applied Physicsen_US
dc.language.isoen_USen_US
dc.titleComplementary Metal-Oxide-Semiconductor Micro-Electro-Mechanical-System Reconfigurable Cantilever Resonator with Multiple Electrostatic Electrodesen_US
dc.typeArticleen_US
dc.identifier.doi10.1143/JJAP.49.116501en_US
dc.identifier.journalJAPANESE JOURNAL OF APPLIED PHYSICSen_US
dc.citation.volume49en_US
dc.citation.issue11en_US
dc.citation.spageen_US
dc.citation.epageen_US
dc.contributor.department電機工程學系zh_TW
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentDepartment of Electrical and Computer Engineeringen_US
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
Appears in Collections:Articles


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