THE INFLUENCE OF PROCESS PARAMETERS ON THE STRUCTURE AND MORPHOLOGY OF PULSED PLASMA-POLYMERIZED OCTAFLUOROTOLUENE FILMS

Abstract

This work describes amorphous fluorinated polymer films deposited by pulsed plasma polymerizations of octafluorotoluene (PPP-OFT) monomers on ITO glass as the hole-injection layer of organic electroluminescent (EL) devices, in order to study the influence of sample position and duty cycle on PPP-OFT film characteristics, and also to find a good process to yield a higher retention degree of monomers and lower roughness of PPP-OFT fluorocarbon films. Experimental results revealed that PPP-OFT films deposited at positions far away from the RF coil and close to the monomer inlet showed less roughness than films deposited near the high RF-flux regions. In addition, the retention of the monomers in the PPP-OFT layer will be high if the deposition is conducted near the monomer inlet but some distance away from the RF electrode. Moreover, amorphous fluorinated polymer films can be deposited with higher fluorine to carbon (F/C) ratios and CF(2) contents at proper substrate positions by means of different sticking coefficients of free radicals dissociated by octafluorotoluene monomers.