A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER

Title:	A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER
Authors:	CHANG, TC WU, CW CHOU, C 光電工程學系 Department of Photonics
Keywords:	MOIRE FRINGES;RONCHI RULING
Issue Date:	1-Jun-1992
Abstract:	A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.
URI:	http://dx.doi.org/10.1143/JJAP.31.1940 http://hdl.handle.net/11536/3410
ISSN:	0021-4922
DOI:	10.1143/JJAP.31.1940
Journal:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume:	31
Issue:	6A
Begin Page:	1940
End Page:	1941
Appears in Collections:	Articles

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