標題: | HIGH ORIENTATION CDS THIN-FILMS GROWN BY PULSED LASER AND THERMAL EVAPORATION |
作者: | DAI, CM HORNG, L HSIEH, WF SHIH, YT TSAI, CT CHUU, DS 電子物理學系 光電工程學系 Department of Electrophysics Department of Photonics |
公開日期: | 1-五月-1992 |
摘要: | Undoped CdS films have been grown by pulsed laser evaporation (PLE) and thermal evaporation (TE) techniques on Corning's 7059 glass at a substrate temperature between room temperature and 250-degrees-C. The deposition rates are 0.07 angstrom/s for PLE and 60 angstrom/s for the TE technique. These as-deposited films have high (002) preferred orientation by both techniques even without preheating the substrate. However, films deposited by PLE have more preferred orientation and larger grain size. These features make the PLE films have sharper Raman peaks, smaller Raman shift of surface mode and more overtones of longitudinal optical phonon mode observed than those in TE films. The transparency of PLE or TE films for wavelengths which are larger than that of absorption edge is around 90% on average. |
URI: | http://dx.doi.org/10.1116/1.578175 http://hdl.handle.net/11536/3440 |
ISSN: | 0734-2101 |
DOI: | 10.1116/1.578175 |
期刊: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS |
Volume: | 10 |
Issue: | 3 |
起始頁: | 484 |
結束頁: | 488 |
顯示於類別: | 期刊論文 |