Low V-t gate-first Al/TaN/[Ir3Si-HfSi2-x]/HfLaON CMOS using simple laser annealing/reflection

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DC Field	Value	Language
dc.contributor.author	Liao, C. C.	en_US
dc.contributor.author	Chin, Albert	en_US
dc.contributor.author	Su, N. C.	en_US
dc.contributor.author	Li, M. -F.	en_US
dc.contributor.author	Wang, S. J.	en_US
dc.date.accessioned	2014-12-08T15:05:01Z	-
dc.date.available	2014-12-08T15:05:01Z	-
dc.date.issued	2008	en_US
dc.identifier.uri	http://hdl.handle.net/11536/3552	-
dc.description.abstract	We report low V-t Al/TaN/[Ir3Si-HfSi2-x]/HfLaON CMOS using simple laser annealing/reflection with self-aligned and gate-first process compatible with current VLSI. At 1.05 nm EOT, good phi(ro-eff) of 5.04 and 4.24 eV, low V-t of -0.16 and 0.13 V, high mobility of 85 and 209 cm(2)/Vs, and small 85 degrees C BTI <= 40 mV (10 MV/cm, 1 hr) are measured for p- and n-MOS.	en_US
dc.language.iso	en_US	en_US
dc.title	Low V-t gate-first Al/TaN/[Ir3Si-HfSi2-x]/HfLaON CMOS using simple laser annealing/reflection	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2008 SYMPOSIUM ON VLSI TECHNOLOGY	en_US
dc.citation.spage	149	en_US
dc.citation.epage	150	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:000259442500073	-
Appears in Collections:	Conferences Paper