DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	CHIU, HT	en_US
dc.contributor.author	CHANG, WP	en_US
dc.date.accessioned	2014-12-08T15:05:01Z	-
dc.date.available	2014-12-08T15:05:01Z	-
dc.date.issued	1992-01-15	en_US
dc.identifier.issn	0261-8028	en_US
dc.identifier.uri	http://dx.doi.org/10.1007/BF00724610	en_US
dc.identifier.uri	http://hdl.handle.net/11536/3553	-
dc.language.iso	en_US	en_US
dc.title	DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1007/BF00724610	en_US
dc.identifier.journal	JOURNAL OF MATERIALS SCIENCE LETTERS	en_US
dc.citation.volume	11	en_US
dc.citation.issue	2	en_US
dc.citation.spage	96	en_US
dc.citation.epage	98	en_US
dc.contributor.department	交大名義發表	zh_TW
dc.contributor.department	應用化學系	zh_TW
dc.contributor.department	National Chiao Tung University	en_US
dc.contributor.department	Department of Applied Chemistry	en_US
dc.identifier.wosnumber	WOS:A1992HB97600012	-
dc.citation.woscount	45	-
顯示於類別：	期刊論文