標題: DEPOSITION OF SILICON-CARBIDE THIN-FILMS FROM DODECAMETHYLCYCLOHEXASILANE
作者: CHIU, HT
LEE, SF
交大名義發表
應用化學系
National Chiao Tung University
Department of Applied Chemistry
公開日期: 15-十一月-1991
URI: http://dx.doi.org/10.1007/BF00722649
http://hdl.handle.net/11536/3633
ISSN: 0261-8028
DOI: 10.1007/BF00722649
期刊: JOURNAL OF MATERIALS SCIENCE LETTERS
Volume: 10
Issue: 22
起始頁: 1323
結束頁: 1325
顯示於類別:期刊論文