標題: | DEPOSITION OF SILICON-CARBIDE THIN-FILMS FROM DODECAMETHYLCYCLOHEXASILANE |
作者: | CHIU, HT LEE, SF 交大名義發表 應用化學系 National Chiao Tung University Department of Applied Chemistry |
公開日期: | 15-十一月-1991 |
URI: | http://dx.doi.org/10.1007/BF00722649 http://hdl.handle.net/11536/3633 |
ISSN: | 0261-8028 |
DOI: | 10.1007/BF00722649 |
期刊: | JOURNAL OF MATERIALS SCIENCE LETTERS |
Volume: | 10 |
Issue: | 22 |
起始頁: | 1323 |
結束頁: | 1325 |
顯示於類別: | 期刊論文 |