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學術出版;;Publications
期刊論文;;Articles
DEPOSITION OF SILICON-CARBIDE THIN-FILMS FROM DODECAMETHYLCYCLOHEXASILANE
DEPOSITION OF SILICON-CARBIDE THIN-FILMS FROM DODECAMETHYLCYCLOHEXASILANE
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Date
1991-11-15
Authors
CHIU, HT
LEE, SF
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DOI
10.1007/BF00722649
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URI
http://dx.doi.org/10.1007/BF00722649
https://ir.lib.nycu.edu.tw/handle/11536/3633
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