標題: Microstructure evolution and dielectric properties of Ba0.7Sr0.3TiO3 parallel plate capacitor with Cr interlayer
作者: Ho, Chia-Cheng
Chiou, Bi-Shiou
Chang, Li-Chun
電子工程學系及電子研究所
Innovative Packaging Research Center
Department of Electronics Engineering and Institute of Electronics
Innovative Packaging Research Center
關鍵字: dielectric material;interlayer;microstructure;capacitor;BST
公開日期: 15-Dec-2007
摘要: The microstructure, crystalline phase, surface morphology, and dielectric properties of a sandwich structure of Ba0.7Sr0.3TiO3/Cr/ Ba0.7Sr0.3TiO3 (BST/Cr/BST) dielectric are characterized to understand the influence of the nano-Cr interlayer. BST dielectrics inserted with Cr film of thickness ranged from 2 nm to 15 nm all show the crystalline cubic phase. However, TiO2 layer is formed on the upper BST layer after the BST/Cr/BST dielectrics are annealed at 900 degrees C in O-2 atmosphere for one hour. In this study, TEM, AFM, SEM, X-ray diffraction, and AES are employed to investigate the microstructure evolution of the BST/Cr/BST dielectrics after annealing. The correlations between the microstructure and the dielectric properties of the Pt/BST/Cr/BST/Pt capacitors with various Cr thicknesses are explored. (C) 2007 Elsevier B.V. All tights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2007.05.077
http://hdl.handle.net/11536/3708
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2007.05.077
期刊: SURFACE & COATINGS TECHNOLOGY
Volume: 202
Issue: 4-7
起始頁: 768
結束頁: 773
Appears in Collections:Conferences Paper


Files in This Item:

  1. 000251618900033.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.