標題: | Microstructure evolution and dielectric properties of Ba0.7Sr0.3TiO3 parallel plate capacitor with Cr interlayer |
作者: | Ho, Chia-Cheng Chiou, Bi-Shiou Chang, Li-Chun 電子工程學系及電子研究所 Innovative Packaging Research Center Department of Electronics Engineering and Institute of Electronics Innovative Packaging Research Center |
關鍵字: | dielectric material;interlayer;microstructure;capacitor;BST |
公開日期: | 15-Dec-2007 |
摘要: | The microstructure, crystalline phase, surface morphology, and dielectric properties of a sandwich structure of Ba0.7Sr0.3TiO3/Cr/ Ba0.7Sr0.3TiO3 (BST/Cr/BST) dielectric are characterized to understand the influence of the nano-Cr interlayer. BST dielectrics inserted with Cr film of thickness ranged from 2 nm to 15 nm all show the crystalline cubic phase. However, TiO2 layer is formed on the upper BST layer after the BST/Cr/BST dielectrics are annealed at 900 degrees C in O-2 atmosphere for one hour. In this study, TEM, AFM, SEM, X-ray diffraction, and AES are employed to investigate the microstructure evolution of the BST/Cr/BST dielectrics after annealing. The correlations between the microstructure and the dielectric properties of the Pt/BST/Cr/BST/Pt capacitors with various Cr thicknesses are explored. (C) 2007 Elsevier B.V. All tights reserved. |
URI: | http://dx.doi.org/10.1016/j.surfcoat.2007.05.077 http://hdl.handle.net/11536/3708 |
ISSN: | 0257-8972 |
DOI: | 10.1016/j.surfcoat.2007.05.077 |
期刊: | SURFACE & COATINGS TECHNOLOGY |
Volume: | 202 |
Issue: | 4-7 |
起始頁: | 768 |
結束頁: | 773 |
Appears in Collections: | Conferences Paper |
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