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DC FieldValueLanguage
dc.contributor.authorCHIU, HTen_US
dc.contributor.authorCHANG, WPen_US
dc.date.accessioned2014-12-08T15:05:10Z-
dc.date.available2014-12-08T15:05:10Z-
dc.date.issued1991-08-25en_US
dc.identifier.issn0065-7727en_US
dc.identifier.urihttp://hdl.handle.net/11536/3709-
dc.language.isoen_USen_US
dc.titleETHYLIMIDOTANTALUM COMPLEX AS PRECURSOR TO TANTALUM NITRIDE THIN-FILMSen_US
dc.typeMeeting Abstracten_US
dc.identifier.journalABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETYen_US
dc.citation.volume202en_US
dc.citation.issueen_US
dc.citation.spage74en_US
dc.citation.epageINORen_US
dc.contributor.department應用化學系zh_TW
dc.contributor.departmentDepartment of Applied Chemistryen_US
dc.identifier.wosnumberWOS:A1991HG08002127-
dc.citation.woscount0-
Appears in Collections:Articles


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