標題: DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
作者: CHIU, HT
CHANG, WP
交大名義發表
應用化學系
National Chiao Tung University
Department of Applied Chemistry
公開日期: 15-Jan-1992
URI: http://dx.doi.org/10.1007/BF00724610
http://hdl.handle.net/11536/3553
ISSN: 0261-8028
DOI: 10.1007/BF00724610
期刊: JOURNAL OF MATERIALS SCIENCE LETTERS
Volume: 11
Issue: 2
起始頁: 96
結束頁: 98
Appears in Collections:Articles