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學術出版;;Publications
期刊論文;;Articles
DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
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Date
1992-01-15
Authors
CHIU, HT
CHANG, WP
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Volume Title
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DOI
10.1007/BF00724610
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URI
http://dx.doi.org/10.1007/BF00724610
https://ir.lib.nycu.edu.tw/handle/11536/3553
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