DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
| dc.citation.epage | 98 | en_US |
| dc.citation.issue | 2 | en_US |
| dc.citation.spage | 96 | en_US |
| dc.citation.volume | 11 | en_US |
| dc.citation.woscount | 45 | |
| dc.contributor.author | CHIU, HT | en_US |
| dc.contributor.author | CHANG, WP | en_US |
| dc.contributor.department | 交大名義發表 | zh_TW |
| dc.contributor.department | 應用化學系 | zh_TW |
| dc.contributor.department | National Chiao Tung University | en_US |
| dc.contributor.department | Department of Applied Chemistry | en_US |
| dc.date.accessioned | 2014-12-08T15:05:01Z | |
| dc.date.available | 2014-12-08T15:05:01Z | |
| dc.date.issued | 1992-01-15 | en_US |
| dc.identifier.doi | 10.1007/BF00724610 | en_US |
| dc.identifier.issn | 0261-8028 | en_US |
| dc.identifier.journal | JOURNAL OF MATERIALS SCIENCE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1007/BF00724610 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/3553 | |
| dc.identifier.wosnumber | WOS:A1992HB97600012 | |
| dc.language.iso | en_US | en_US |
| dc.title | DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX | en_US |
| dc.type | Article | en_US |
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