標題: COMPOSITION AND CHEMICAL-REACTIONS OF TITANIUM-OXIDE FILMS DEPOSITED BY LASER EVAPORATION
作者: DAI, CM
SU, CS
CHUU, DS
電子物理學系
光電工程學系
Department of Electrophysics
Department of Photonics
公開日期: 15-Mar-1991
摘要: Thin films were deposited on Pyrex glass substrates from Ti and TiO2 targets at room temperature by laser evaporation technique. These films were characterized by scanning electron microscopy, Auger electron spectroscopy, and depth profile analysis. The films deposited from Ti target are TiC(x) and TiO(y) matrix, while films from TiO2 target are almost stoichiometric in oxygen. The films have a smooth surface morphology under a laser power density of 5 X 10(6) W/cm2, which is close to the critical intensity for evaporation. The interface reaction of these films is strong, and the Ti atoms diffuse into the substrate.
URI: http://dx.doi.org/10.1063/1.348473
http://hdl.handle.net/11536/3833
ISSN: 0021-8979
DOI: 10.1063/1.348473
期刊: JOURNAL OF APPLIED PHYSICS
Volume: 69
Issue: 6
起始頁: 3766
結束頁: 3768
Appears in Collections:Articles