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dc.contributor.authorWENG, PKen_US
dc.contributor.authorSHIE, JSen_US
dc.date.accessioned2014-12-08T15:05:30Z-
dc.date.available2014-12-08T15:05:30Z-
dc.date.issued1990-09-01en_US
dc.identifier.issn0924-4247en_US
dc.identifier.urihttp://hdl.handle.net/11536/4022-
dc.description.abstractA new tachometric marker with a surface consisting of right-angle V grooves has been made by the silicon micromachining technique. Anisotropic etching on a (001) silicon surface by three conventional recipes has been adopted. The results of the etched qualities are compared; hydrazine hydrate and potassium hydroxide-isopropanol-water solutions can give good quality right-angle V grooves. The revolving retro-reflection effect associated with this marker is described. When placed on a rotating plane, it can be utilized for wide-angle and remote tachometric measurements, where proximity measurements are either impossible or dangerous.en_US
dc.language.isoen_USen_US
dc.titleA REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETERen_US
dc.typeArticleen_US
dc.identifier.journalSENSORS AND ACTUATORS A-PHYSICALen_US
dc.citation.volume24en_US
dc.citation.issue3en_US
dc.citation.spage203en_US
dc.citation.epage207en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:A1990EP57100006-
dc.citation.woscount7-
顯示於類別:期刊論文