完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | WENG, PK | en_US |
dc.contributor.author | SHIE, JS | en_US |
dc.date.accessioned | 2014-12-08T15:05:30Z | - |
dc.date.available | 2014-12-08T15:05:30Z | - |
dc.date.issued | 1990-09-01 | en_US |
dc.identifier.issn | 0924-4247 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/4022 | - |
dc.description.abstract | A new tachometric marker with a surface consisting of right-angle V grooves has been made by the silicon micromachining technique. Anisotropic etching on a (001) silicon surface by three conventional recipes has been adopted. The results of the etched qualities are compared; hydrazine hydrate and potassium hydroxide-isopropanol-water solutions can give good quality right-angle V grooves. The revolving retro-reflection effect associated with this marker is described. When placed on a rotating plane, it can be utilized for wide-angle and remote tachometric measurements, where proximity measurements are either impossible or dangerous. | en_US |
dc.language.iso | en_US | en_US |
dc.title | A REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETER | en_US |
dc.type | Article | en_US |
dc.identifier.journal | SENSORS AND ACTUATORS A-PHYSICAL | en_US |
dc.citation.volume | 24 | en_US |
dc.citation.issue | 3 | en_US |
dc.citation.spage | 203 | en_US |
dc.citation.epage | 207 | en_US |
dc.contributor.department | 交大名義發表 | zh_TW |
dc.contributor.department | 光電工程學系 | zh_TW |
dc.contributor.department | National Chiao Tung University | en_US |
dc.contributor.department | Department of Photonics | en_US |
dc.identifier.wosnumber | WOS:A1990EP57100006 | - |
dc.citation.woscount | 7 | - |
顯示於類別: | 期刊論文 |