微型高G值智慧型感測器之研究

Abstract

因應現代化的高科技戰爭，各國軍備的發展皆朝向智能化的方向，為了提昇智能武器即時辨識目標之能力，智慧型感測器應運而生，其設計理念主要是利用加速儀等感測器，擷取彈頭撞擊目標及侵徹過程中減加速度訊號，並利用訊號處理裝置與微電腦，對所獲取的訊息進行解算分析與邏輯判斷，期能依照預先設定的程序，實現最佳炸點的控制功能。文獻上查得之智能武器，大都使用G值感測裝置作為主要感測元件，而傳統的慣性G值感測器，主要運用懸臂樑或軸向壓縮彈簧作為觸發裝置，通常於較低G值量測時功能並無問題，但對於高G值(＞300G)量測時就顯得響應時間太長致使觸發太慢；另外在更高G值的環境作用下易產生結構損毀的失效現象。本研究利用微機電技術，開發一種可量測高G值之微型慣性感測器，可針對3,000~21,000G範圍內進行感測。藉著選擇不同的標準質量塊與彈簧圈數進行搭配，可獲得不同觸發G值之感測器，模擬與實測結果皆顯示，不論增加標準質量或是減少彈簧常數，皆可縮短反應時間，且於21,000G的作用下，功能仍能穩定運作，符合高G值量測需求。另外再搭配簡易之數位訊號處理裝置，可組成一成本低廉之智慧型感測器，能針對四種不同目標物之材質，提供即時辨識之功能，未來可運用在ㄧ般常規使用之穿甲與攻堅武器。

Intelligent weapons provide a real-time estimation of a medium as the weapon is penetrating through hard object. Input signals are provided by an accelerometer used as a primary sensor. The purpose is to provide for detonation at the proper point as the high-speed penetrator passes through various layers of the object. Most conventional G sensors use cantilever beams or axial springs as triggering devices. The reaction time of these conventional G sensors are often far too long. In many high G (＞300G) applications, they completely fail to function. In this study, we proposed a MEMS-based high G smart sensor, which not only functions at a very high G impact but also identifies the material when a projectile makes an impact on a hard object. This high G smart sensor is intended for use at 3,000–21,000G. The sensor was made of silicon and the triggering mechanism involves a cantilever and a spring structure. The mechanical sensitivity of the sensors can be adjusted to pre-set the triggering G value. Four sensors, each designated to trigger its own G value were integrated in a unit. Experiments demonstrated that this unit can identify the characteristics of an object.