FORMATION AND CHARACTERIZATION OF A PTSI CONTACTED N+P SHALLOW JUNCTION

doi:10.1063/1.346531

Title:	FORMATION AND CHARACTERIZATION OF A PTSI CONTACTED N+P SHALLOW JUNCTION
Authors:	TSUI, BY CHEN, MC 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1-Sep-1990
URI:	http://dx.doi.org/10.1063/1.346531 http://hdl.handle.net/11536/4028
ISSN:	0021-8979
DOI:	10.1063/1.346531
Journal:	JOURNAL OF APPLIED PHYSICS
Volume:	68
Issue:	5
Begin Page:	2265
End Page:	2274
Appears in Collections:	Articles