標題: | LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TIN AND ZRN THIN-FILMS FROM TI(NET2)4 AND ZR(NET2)4 |
作者: | CHIU, HT HUANG, CC 應用化學系 Department of Applied Chemistry |
公開日期: | 26-八月-1990 |
URI: | http://hdl.handle.net/11536/4035 |
ISSN: | 0065-7727 |
期刊: | ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY |
Volume: | 200 |
Issue: | |
起始頁: | 253 |
結束頁: | INOR |
顯示於類別: | 期刊論文 |