标题: | 以超高频电浆化学气相沈积法在可挠式PDMS基板上制备高效率非晶矽薄膜太阳能电池 Fabrication of High Efficiency a-Si Thin-Film Solar Cell on Flexible PDMS Substrate by Very High Frequency Plasma Chemical Vapor Deposition |
作者: | 王瑞豪 Wang, Jui-Hao 陈家富 黄华宗 Chen, Chia-Fu Whang, Wha-Tzong 材料科学与工程学系 |
关键字: | 橘皮结构;聚二甲基矽氧烷;热应力;二氧化钛;高频电浆化学沈积;原子力显微镜;黄光微影;elastical;Matel;wavy structures;AFM;high density plasma;amorphous silicon film;microcrystalline silicon film;wide and narrow band gap silicon-based films;thin film silicon solar cell |
公开日期: | 2010 |
摘要: | 本论文中,我们利用高频(27.12 MHz)电浆化学气相沉积系统(VHF-PECVD)以自组式矽胶基板,制备高效率可挠式薄膜太阳能电池。首先采用无须黄光微影设备的简单方式来制作高反射式微光学元件,以降低成本及提升光学特性。本论文主要使用聚二甲基矽氧烷 (polydimethylsiloxane; PDMS)高分子混合奈米尺寸的二氧化钛粉末形成高反射率材料并利用不同温度梯度导入热应力,形成规律性之结构似橘皮表面(orange-like),接着利用不同比例酸化处理,使得表面形成氧化矽,固定其规律性的结构,以制备可挠式基板,并结合高频电浆化学沈积镀膜技术,制备可挠式非晶矽薄膜太阳能电池。在分析上,藉由原子力显微镜去探讨热应力所产生的波纹结构之影响,去探讨制作出来结构的光学特性。 最后,以橘皮结构(5.21%)取代未经酸化处理聚二甲基矽氧烷材料(4.6%)为基材沈积(Ag/n-i-p/SnO2/ silicone rubbery )结构制备薄膜太阳能电池元件,发现最佳转换效率可由达4.6%提升至5.21%。 In past two-three decades, single crystalline Si solar cells have dominated the market for solar energy application. Thin-film silicon solar cells are expected to become a major type of solar cells, because both the production cost and amount of silicon material used can be reduced in comparison with bulk-type solar cells. Microoptical elements have been investigated and their functions mainly are grouped into three regions: (1) beam shaping, (2) interconnections,and (3) imaging. There are other cheap tehnologies to be able to instead the traditional method fabricated these microoptical structures, such as lithography or laser holography. Hence, this purposeof this study is to find a way to fabricate microoptical structures without some expensive instrument. This study is mainly used elastical rubber material introduced different stress, such as tension, compression and bending stress. Then, the surface of rubber material was coated a layer metallic films to generate ordered structures. These structures can use as diffractive optical element and apply in photoelectric devices. This approach can not only reduce the fabrication cost of diffractive optical element but also have different diffractive patterns generated under different stress introduced on the rubber material. An atomic force microscope (AFM) is used to explore the effect of wavy structures formed on the mismatch interface between metal films and the surface of PDMS. The optical measurement instrument, set up by our laboratory, is able to discuss the character of the fabricated microstructures. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT079418844 http://hdl.handle.net/11536/40799 |
显示于类别: | Thesis |