提昇TFT-LCD 廠去光阻劑回收效益

Abstract

TFT-LCD產業去光阻液(Stripper)使用量大，使得生產製造過程產生的廢棄物亦隨之增加。因此，如何降低化學品耗用量，已成為各製造廠關切的問題，故TFT 廠皆會設置Stripper回收系統，將機台使用過之化學品去除光阻後再回收使用，本研究之方向將從去光阻液供應系統、去光阻液回收系統、生產設備系統及增設日常管理系統全面探討TFT-LCD廠去光阻液回收量及使用量分析。 本研究共分為兩大方向，第一為調整調整回收系統參數，找出提升回收率之最佳操作條件。第二為增設日常管理系統即時監控回收系統運轉之供應量、排放量、回收率，監控化學供應系統及回收系統。期望透過上述方式提升系統回收能力及增加回收量，以減少廢液產出及增加系統回收量，達到减廢及環保之效益。

本研究之方法為找出適當參數及利用日常管理手法，達到減少廢 液產出及增加系統回收量之目的。

The TFT-LCD industry use much chemicals and materials in the production process increase more and more rejects. Therefore, how to reduce the use of chemicals is major care for every manufacturing factory. So TFT industry are set the Stripper recycle system to remove the photoresist and then to recycling use. This research of the direction from the Chemical Supply System, Stripper system, production equipment and additional Daily management system to study the chemical usage of the TFT-LCD industry.

This research altogether divides into two parts to carry on. First stage to adjust the Stripper recycle system parameters to identify increase the recycle rate of the optimum operating conditions. The second stage makes the Daily management system to monitoring all parameters of the chemical supply system and the Stripper reclcle system. Expect to increase the system recycling capabilities and increase recycling rate to reduce waste Stripper and increase system recycling rate to achieve waste Stripper reduction and environmental benefits.

This research expects to identify the appropriate parameters to achieve the purpose of reducing stripper waste and increase recycling system rate.