提升水回收效益之研究--以IC封測廠為例

Abstract

根據科學工業園區節約用水輔導計劃執行要點，有關廢水回收量，製程回收率應大於70%、全廠回收率應大於50%，而全廠排放率需在80%以下。本研究以園區內某IC封測廠為研究對象，該廠目前的回收率，製程回收率為69％、全廠回收率為52.1％，而全廠排放率33％等，故該廠目前的製程回收率不符合相關規定。 本研究的目的，在針對用水結構、技術設施性能及操作經驗等問題，以IC封測廠為例，探討各種廢水回收風險，並評估水回收量與成本改善結果。期望有助於提昇回收率及減少成本，以落實法規要求、提高環境品質、並達到永續發展的目標。本研究首先針對廠內的各用水單元，如超純水系統、廢水系統、回收水系統、及製程系統等，進行評估回收的可能性與選定改善點。接著，進行實廠單車試驗，除改善各系統處理流程外，並安裝水錶及定期紀錄水量，也測試回收水以瞭解其水質是否可回收再利用。最後，進行實際上線運轉，觀察回收水量、回收率及成本狀況。改善結果製程回收率增加4%，全廠回收率增加7.1%，而全廠排放率降低2.6%。此數據顯示，該廠利用建議的方法，可達到科學工業園區所訂定之標準。至於成本方面，全廠總用水成本可降低3472元/天，至於增加廢水回收率的同時，亦可降低廢水處理費用。本研究的分析與建議方法，可提供該廠作為未來執行水回收政策之參考。

According to the「Regulations for Implementing Water Conservation Assistant Project in the Science-based Industrial Park」, the recycle rate of waste water in process should exceed 70%, the recycle rate in a plant should exceed 50%, the discharge rate should be less than 80%. An IC packaging and testing plant inside the park is chosen to study its water recoervey benefits. At the present time, the plant has 69% of lthe recycle rate of process, 52.1% of the recycle rate, and 33% of the discharge rate. Obviously, the wastewater recovery system of the target plant does not meet the related stipulation. The purpose of this study is to assess the risk of wastewater recycling, to evaluate the improvement of wastewater recovery, and to reduce the capital expenditure based on the means of water utilization, technical facility performance and operating experience. The results are expected to improve the wastewater recovery rate and reduce the capital expenditure, and in the mean time, meet the requirement of regulation, improve the environmental quality, and achieve the goal of sustainable development. In this study, the possibility of the wastewater recycling and the improvement unit were evaluated in water utilities, such as the hyper-puried waster system, wastewater system, recycling system, and the processing system. During the test run in each system, not only the water gauge was installed and recorded routinely, but the quality of recycled water was also investigated for recovery usage. Finally, the recycling quantity of wastewater, the recovery rate of each system, and the reduction of capital expenditure were evaluated during the full-scale operation. The results indicate that the recovery rate of processing system and whole plant are increased 4% and 7.1%, respectively while the discharging was decreased 2.6%. Thus, the results of the adjusted operation demonstrate that the regulation requirement is met. The capital of total water usage is decreased NT3,472 dollar/day and the wastewater treatment expense is also decreased. This result may therefore be used as a reference for future wastewater recovery in this IC packaging and testing plant.