低壓縮比蠕動式微幫浦分析

Abstract

本研究中探討二腔及三腔式低壓縮比的蠕動式微幫浦。壓縮比約為0.00706。測試不同的蠕動相位及背壓下，對微幫浦淨流量的影響。此外我們利用一套塊狀理論，分析微幫浦的流場，在非穩態的模式下可預測微幫浦內壓力及流量的變化。由模擬的結果可知，逆向三相位的蠕動形式，在低壓縮比的蠕動式微幫浦中能產生最大的淨流量，另外微幫浦的腔體數目增加後，可承受較大的背壓。

A double and triple chambers low-compression ratio peristaltic micropump is presented in this thesis. The compression ratio is almost 0.00706. We calculate the net flow rate of micropump with different peristaltic motion and different back pressures. Furthermore, the flow of micropump is also analyzed by using lump system. The unsteady model is capable of predicting the pressure and flow rate of micropump inside. By the simulation result, the peristaltic motion of reverse three-phase achieved a maximum flow rate. Besides, the micropump can sustain maximum backpressure when increase the chambers of micropump.