CONTACT RESISTIVITIES OF AL AND TI ON SI MEASURED BY A SELF-ALIGNED VERTICAL KELVIN TEST RESISTOR STRUCTURE

標題:	CONTACT RESISTIVITIES OF AL AND TI ON SI MEASURED BY A SELF-ALIGNED VERTICAL KELVIN TEST RESISTOR STRUCTURE
作者:	WEN, LY TAN, FL CHUNG, LL 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	1-十一月-1989
URI:	http://hdl.handle.net/11536/4266
ISSN:	0038-1101
期刊:	SOLID-STATE ELECTRONICS
Volume:	32
Issue:	11
起始頁:	997
結束頁:	1001
顯示於類別：	期刊論文