SPECIFIC CONTACT RESISTIVITY MEASUREMENT BY A VERTICAL KELVIN TEST STRUCTURE

標題:	SPECIFIC CONTACT RESISTIVITY MEASUREMENT BY A VERTICAL KELVIN TEST STRUCTURE
作者:	TAN, FL LEU, LY CHUNG, LL 電子工程學系及電子研究所電控工程研究所 Department of Electronics Engineering and Institute of Electronics Institute of Electrical and Control Engineering
公開日期:	1-Jun-1987
URI:	http://hdl.handle.net/11536/4640
ISSN:	0018-9383
期刊:	IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume:	34
Issue:	6
起始頁:	1390
結束頁:	1395
Appears in Collections:	Articles

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